Microstructuring of the Surface of High-Resistivity Single-Crystalline Silicon by Chemical Etching
Crossref DOI link: https://doi.org/10.1134/S1064226919090109
Published Online: 2019-09-16
Published Print: 2019-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kashuba, A. S.
Permikina, E. V.
Golovin, S. V.
Lakmanova, M. R.
Pogozheva, A. V.
Text and Data Mining valid from 2019-09-01
Version of Record valid from 2019-09-01
Article History
Received: 29 September 2017
Revised: 16 October 2017
Accepted: 24 October 2017
First Online: 16 September 2019