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Features of Indium Tin Oxide Film Deposition by Magnetron Sputtering

Crossref DOI link: https://doi.org/10.1134/S1064226920030110

Published Online: 2020-04-07

Published Print: 2020-03

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Luzanov, V. A.
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Text and Data Mining valid from 2020-03-01

Version of Record valid from 2020-03-01
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Article History

Received: 27 August 2019

Revised: 27 August 2019

Accepted: 19 September 2019

First Online: 7 April 2020