Crossmark

Preparation of Silicon Oxide Films by a Hot-Target Impulse Magnetron Deposition in a Reactive Mixture

Published Online: 2024-01-02

Published Print: 2023-11

Authors

Lisenkov, V. Yu.

Kharkov, M. M.

Kolodko, D. V.

Tumarkin, A. V.

Kaziev, A. V.
License Information

Text and Data Mining valid from 2023-11-01

Version of Record valid from 2023-11-01
More Information

Article History

Received: 26 April 2023

Revised: 26 April 2023

Accepted: 30 April 2023

First Online: 2 January 2024

CONFLICT OF INTEREST

: The authors of this work declare that they have no conflicts of interest.

Document is current