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Flux of High-Energy Positive Oxygen Ions from Plasma to a Substrate in a Pulsed Magnetron Discharge with a Hot Target

Published Online: 2023-12-13

Published Print: 2023-10

Authors

Kolodko, D. V.

Kaziev, A. V.

Ageichenkov, D. G.

Lisenkov, V. Yu.
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Text and Data Mining valid from 2023-10-01

Version of Record valid from 2023-10-01
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Article History

Received: 17 May 2023

Revised: 17 May 2023

Accepted: 25 May 2023

First Online: 13 December 2023

CONFLICT OF INTEREST

: The authors of the declare that they have no conflicts of interest.

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