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Generation of low-temperature gas discharge plasma in large vacuum volumes for plasma chemical processes

Published Online: 2015-06-17

Published Print: 2015-05

Authors

Koval, N. N.

Ivanov, Yu. F.

Lopatin, I. V.

Akhmadeev, Yu. H.

Shugurov, V. V.

Krysina, O. V.

Denisov, V. V.
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Article History

Received: 1 January 2013

First Online: 17 June 2015

Document is current