Kinetics of surface pyrolysis of a silane–germane gas mixture under conditions of epitaxial film deposition of Si1–x Ge x solid solutions
Crossref DOI link: https://doi.org/10.1134/S107036321512004X
Published Online: 2016-02-06
Published Print: 2015-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Orlov, L. K.
Ivin, S. V.
Text and Data Mining valid from 2015-12-01