Aluminum hydroxocarboxylates in solution deposition of planarization alumina films
Crossref DOI link: https://doi.org/10.1134/S1070363217060172
Published Online: 2017-08-02
Published Print: 2017-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Tsymbarenko, D. M.
Martynova, I. A.
Ryzhkov, N. V.
Kuz’mina, N. P.
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