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Epitaxial Silicon Carbide on Silicon. Method of Coordinated Substitution of Atoms (A Review)

Crossref DOI link: https://doi.org/10.1134/S1070363222040028

Published Online: 2022-05-31

Published Print: 2022-04

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Kukushkin, S. A. https://orcid.org/0000-0002-2973-8645
Osipov, A. V. https://orcid.org/0000-0002-2911-7806
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Text and Data Mining valid from 2022-04-01

Version of Record valid from 2022-04-01
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Article History

Received: 7 February 2022

Revised: 7 February 2022

Accepted: 10 March 2022

First Online: 31 May 2022

CONFLICT OF INTEREST

: No conflict of interest was declared by the authors.