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Gas-dynamic and thermal processes in the synthesis of trichlorosilane by hydrogen reduction of silicon tetrachloride in a high-frequency discharge

Crossref DOI link: https://doi.org/10.1134/S1070427214090092

Published Online: 2014-12-30

Published Print: 2014-09

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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