Films of hydrogenated silicon oxycarbonitride. Part I. Chemical and phase composition
Crossref DOI link: https://doi.org/10.1134/S1087659614050034
Published Online: 2014-10-11
Published Print: 2014-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Fainer, N. I.
Plekhanov, A. G.
Rumyantsev, Yu. M.
Maximovskii, E. A.
Shayapov, V. R.
Text and Data Mining valid from 2014-09-01