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The formation and study of sensor thin layers based on zirconium and rare earth metal (Ce, Y, and Tb) oxides and the preparation of metal-oxide-semiconductor structures based on them

Crossref DOI link: https://doi.org/10.1134/S1087659614060029

Published Online: 2014-12-02

Published Print: 2014-11

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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