Hydrogenated silicon oxycarbonitride films. Part II. Physicochemical and functional properties
Crossref DOI link: https://doi.org/10.1134/S1087659614060042
Published Online: 2014-12-02
Published Print: 2014-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Fainer, N. I.
Plekhanov, A. G.
Rumyantsev, Yu. M.
Yushina, I. V.
Shayapov, V. R.
Kichai, V. N.
Text and Data Mining valid from 2014-11-01