Physical-chemical properties of silicon carbonitride films prepared using laser-plasma deposition from hexamethyldisilazane
Crossref DOI link: https://doi.org/10.1134/S1087659615020042
Published Online: 2015-04-15
Published Print: 2015-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Demin, V. N.
Smirnova, T. P.
Borisov, V. O.
Grachev, G. N.
Smirnov, A. L.
Khomyakov, M. N.
Text and Data Mining valid from 2015-03-01