Synthesis of Si–C–N–Fe films from volatile organosilicon substances-precursors and ferrocene. Part II. Properties of SiC x N y Fe z films obtained by thermal decomposition of tris(diethylamino)silane and ferrocene
Crossref DOI link: https://doi.org/10.1134/S1087659616050126
Published Online: 2016-10-02
Published Print: 2016-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Pushkarev, R. V.
Fainer, N. I.
Golubenko, A. N.
Rumyantsev, Yu. M.
Nadolinnyi, V. A.
Maksimovskii, E. A.
Korotaev, E. V.
Kaichev, V. V.
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