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Study of chemical bonds and element composition of silicon oxycarbonitride films by the methods of XP-, IR-, and energy-dispersive spectroscopy

Crossref DOI link: https://doi.org/10.1134/S1087659617050042

Published Online: 2017-10-13

Published Print: 2017-09

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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