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Synthesis of Hydrogenated Silicon Oxycarbonitride from a Gas Mixture of Methyltris(Diethylamino)Silane, Nitrogen, and Oxygen

Crossref DOI link: https://doi.org/10.1134/S1087659618060056

Published Online: 2019-03-04

Published Print: 2018-11

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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