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Effect of Periodic Modulation of Tungsten Oxide Magnetron Deposition Angle upon the Obtained Layer Structure according to X-Ray Reflectometry Measurements

Crossref DOI link: https://doi.org/10.1134/S1087659621070075

Published Online: 2022-03-24

Published Print: 2021-12

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Matveev, V. A.

Eruzin, A. A.

Semenova, A. A.

Mjakin, S. V.

Katashev, P. A.
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Text and Data Mining valid from 2021-12-01

Version of Record valid from 2021-12-01
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Article History

Received: 25 January 2022

Revised: 1 February 2022

Accepted: 8 February 2022

First Online: 24 March 2022

CONFLICT OF INTEREST

: The authors declare that they have no conflicts of interest.

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