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Formation of Diamond-Like Carbon Films by the Plasma-Chemical Decomposition of Hydrocarbons

Published Online: 2025-01-13

Published Print: 2024-06

Authors

Povolotskiy, A. V.

Smirnov, E. V.

Tver’yanovich, Yu. S.
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Text and Data Mining valid from 2024-06-01

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Article History

Received: 15 December 2023

Revised: 16 June 2024

Accepted: 9 July 2024

First Online: 13 January 2025

CONFLICT OF INTEREST

: The authors of this work declare that they have no conflicts of interest.

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