Microstructure and surface morphology of thin AlN films formed on sapphire by dual magnetron sputtering
Crossref DOI link: https://doi.org/10.1134/S1995078016030186
Published Online: 2016-06-23
Published Print: 2016-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zaitsev, S. V.
Nartsev, V. M.
Vashchilin, V. S.
Prokhorenkov, D. S.
Evtushenko, E. I.
License valid from 2016-05-01