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Microstructure and surface morphology of thin AlN films formed on sapphire by dual magnetron sputtering

Published Online: 2016-06-23

Published Print: 2016-05

Authors

Zaitsev, S. V.

Nartsev, V. M.

Vashchilin, V. S.

Prokhorenkov, D. S.

Evtushenko, E. I.
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Text and Data Mining valid from 2016-05-01

Version of Record valid from 2016-05-01
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Article History

Received: 19 June 2015

Accepted: 15 February 2016

First Online: 23 June 2016

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