Plasma nanoscale structuring of GaAs in a high-frequency discharge of freon and freon/argon mixtures
Crossref DOI link: https://doi.org/10.1134/S1995078016050062
Published Online: 2016-10-20
Published Print: 2016-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Dunaev, A. V.
License valid from 2016-09-01