Improving the efficiency of laser-induced backside wet etching of optically transparent materials as a result of generation of carbon and silver nanoparticles
Crossref DOI link: https://doi.org/10.1134/S1995078017010141
Published Online: 2017-02-24
Published Print: 2017-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Tsvetkov, M. Yu.
Yusupov, V. I.
Timashev, P. S.
Golant, K. M.
Minaev, N. V.
Bagratashvili, V. N.
License valid from 2017-01-01