Modeling of radio-frequency capacitive discharge under atmospheric pressure in Argon
Crossref DOI link: https://doi.org/10.1134/S1995080217060154
Published Online: 2017-11-16
Published Print: 2017-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Chebakova, V. Yu.
License valid from 2017-11-01