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The influence of the conditions of synthesis on the composition and mechanical properties of silicon oxycarbonitride nanocomposite films

Crossref DOI link: https://doi.org/10.1134/S2070205117020095

Published Online: 2017-03-23

Published Print: 2017-03

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Fainer, N. I.

Plekhanov, A. G.

Khomyakov, M. N.

Maksimovskiy, E. A.

Rumyantsev, Yu. M.
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License valid from 2017-03-01