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Investigation of Si–B–C–N coatings produced by ion sputtering of SiBC target

Published Online: 2017-09-22

Published Print: 2017-09

Authors

Kiryukhantsev-Korneev, Ph. V.

Sheveyko, A. N.

Lemesheva, M.

Rupasov, S. I.

Levashov, E. A.
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Text and Data Mining valid from 2017-09-01

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Article History

Received: 10 April 2017

First Online: 22 September 2017

Document is current