Investigation of Si–B–C–N coatings produced by ion sputtering of SiBC target
Crossref DOI link: https://doi.org/10.1134/S2070205117050094
Published Online: 2017-09-22
Published Print: 2017-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kiryukhantsev-Korneev, Ph. V.
Sheveyko, A. N.
Lemesheva, M.
Rupasov, S. I.
Levashov, E. A.
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