Application of Mosaic Cathodes Containing TiB (STIM-4) Segments for Deposition of Protective Coatings in the Ti–Al–Cr–B–N System by the Method of Closed Field Unbalanced Magnetron Sputtering
Crossref DOI link: https://doi.org/10.1134/S2070205122020071
Published Online: 2022-05-23
Published Print: 2022-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kiryukhantsev-Korneev, Ph. V.
Text and Data Mining valid from 2022-04-01
Version of Record valid from 2022-04-01
Article History
Received: 20 July 2021
Revised: 20 September 2021
Accepted: 29 September 2021
First Online: 23 May 2022