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Equilibrium energy and technological characteristics of plasma synthesis of titanium nitride, carbide, and carbonitride from titanium tetrachloride

Crossref DOI link: https://doi.org/10.1134/S2075113316030175

Published Online: 2016-06-04

Published Print: 2016-05

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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