Preparation of Silicon Nitride and Oxonitride by Gas-Phase Pyrolysis of Hexamethyldisilazane
Crossref DOI link: https://doi.org/10.1134/S2075113320020288
Published Online: 2020-04-13
Published Print: 2020-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Ovsyannikov, N. A.
Kargin, Yu. F.
Lysenkov, A. S.
Alad’ev, N. A.
Ivicheva, S. N.
Solntsev, K. A.
Text and Data Mining valid from 2020-03-01
Version of Record valid from 2020-03-01
Article History
Received: 13 May 2019
Revised: 28 May 2019
Accepted: 30 May 2019
First Online: 13 April 2020