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Deposition of Superhard Ti–C–N Plasma Coatings in Nitrogen Atmosphere

Crossref DOI link: https://doi.org/10.1134/S2075113321030114

Published Online: 2021-06-08

Published Print: 2021-05

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Gerasimov, D. Yu.

Sivkov, A. A.
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Text and Data Mining valid from 2021-05-01

Version of Record valid from 2021-05-01
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Article History

Received: 19 March 2020

Revised: 6 July 2020

Accepted: 17 August 2020

First Online: 8 June 2021