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Analysis of Factors Influencing the Selective Etching of {100} Surface of Single-Crystal Gaas Usedto Determine the Dislocation Density

Published Online: 2025-06-13

Published Print: 2024-12

Authors

Verbitsky, R. A.

Polzikova, K. S.

Syrov, Yu. V.

Knyazev, S. N.
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Text and Data Mining valid from 2024-12-01

Version of Record valid from 2024-12-01
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Article History

Received: 5 June 2024

Revised: 2 July 2024

Accepted: 21 August 2024

First Online: 13 June 2025

CONFLICT OF INTEREST

: The authors of this work declare that they have no conflicts of interest.

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