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Deposition of Silicon-Carbon Coatings by Electron Beam Evaporation of Silicon Carbide in an Oxygen-Containing Medium

Crossref DOI link: https://doi.org/10.1134/S2075113325701667

Published Online: 2025-09-24

Published Print: 2025-10

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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