Chemical composition and properties of films produced from hexamethyldisilazane by plasma-enhanced chemical vapor deposition
Crossref DOI link: https://doi.org/10.1134/S0018143916030127
Published Online: 2016-05-19
Published Print: 2016-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Shayapov, V. R.
Rumyantsev, Yu. M.
Plyusnin, P. E.
Text and Data Mining valid from 2016-05-01