EPR Spectroscopy of Diazoquinone–Novolac Resist Films Implanted with P+ and B+ Ions
Crossref DOI link: https://doi.org/10.1134/S0018143920020046
Published Online: 2020-03-25
Published Print: 2020-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Brinkevich, D. I.
Brinkevich, S. D.
Oleshkevich, A. N.
Prosolovich, V. S.
Odzhaev, V. B.
Text and Data Mining valid from 2020-03-01
Version of Record valid from 2020-03-01
Article History
Received: 28 August 2019
Revised: 28 August 2019
Accepted: 21 October 2019
First Online: 25 March 2020