Radiation-Induced Processes in Diazoquinone–Novolac Resist Films under Irradiation with 60Co γ-Rays
Crossref DOI link: https://doi.org/10.1134/S0018143921010070
Published Online: 2021-02-15
Published Print: 2021-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Brinkevich, S. D.
Brinkevich, D. I.
Prosolovich, V. S.
Sverdlov, R. L.
Text and Data Mining valid from 2021-01-01
Version of Record valid from 2021-01-01
Article History
Received: 4 August 2020
Revised: 20 August 2020
Accepted: 2 September 2020
First Online: 15 February 2021