Growth of Titanium Oxide Nanostructures on γ-Аl2О3 by Atomic Layer Deposition
Crossref DOI link: https://doi.org/10.1134/S0020168520120122
Published Online: 2020-12-14
Published Print: 2020-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Malkov, A. A.
Kukushkina, Yu. A.
Sosnov, E. A.
Malygin, A. A.
Text and Data Mining valid from 2020-12-01
Version of Record valid from 2020-12-01
Article History
Received: 30 June 2020
Revised: 27 July 2020
Accepted: 3 August 2020
First Online: 14 December 2020