A magnetron sputtering device with generation of pulsed beams of high-energy gas atoms
Crossref DOI link: https://doi.org/10.1134/S0020441217020117
Published Online: 2017-04-20
Published Print: 2017-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Metel, A. S.
Grigoriev, S. N.
Volosova, M. A.
Melnik, Yu. A.
License valid from 2017-03-01