An Automated Setup for Depositing Sensitive Coatings on the Surfaces of Solid-State Sensors
Crossref DOI link: https://doi.org/10.1134/S002044121805010X
Published Online: 2018-09-27
Published Print: 2018-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Maslennikov, A. V.
Zubkov, I. L.
Text and Data Mining valid from 2018-09-01
Article History
Received: 4 October 2017
Accepted: 18 March 2018
First Online: 27 September 2018