Angular Distributions during Magnetron Sputtering of Polycrystalline Mg, Al, Si, Ti, Cr, Cu, Zn, Ge, Zr, Nb, Mo, Ag, In, Sn, W, Pt, Au, and Bi Targets
Crossref DOI link: https://doi.org/10.1134/S0020441220040314
Published Online: 2020-09-23
Published Print: 2020-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Rogov, A. V.
Kapustin, Yu. V.
Text and Data Mining valid from 2020-09-23
Version of Record valid from 2020-09-23
Article History
Received: 28 February 2020
Revised: 4 March 2020
Accepted: 5 March 2020
First Online: 23 September 2020