A Gas-Discharge Sputtering Device Based on a Planar Magnetron with an Ion Source
Crossref DOI link: https://doi.org/10.1134/S0020441220050218
Published Online: 2020-09-23
Published Print: 2020-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Semenov, A. P.
Semenova, I. A.
Tsyrenov, D. B.-D.
Nikolaev, E. O.
Text and Data Mining valid from 2020-09-23
Version of Record valid from 2020-09-23
Article History
Received: 24 March 2020
Revised: 4 April 2020
Accepted: 5 April 2020
First Online: 23 September 2020