X-ray photoelectron study of the effect of the composition of the initial gas phase on changes in the electronic structure of hexagonal boron nitride films obtained by PECVD from borazine
Crossref DOI link: https://doi.org/10.1134/S0022476616040065
Published Online: 2016-09-29
Published Print: 2016-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Il’inchik, E. A.
Merenkov, I. S.
License valid from 2016-07-01