Thermodynamic Modeling of the CVD Process in the Ni–Si–C–H System
Crossref DOI link: https://doi.org/10.1134/S0036023623602441
Published Online: 2024-03-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Shestakov, V. A.
Kosinova, M. L.
Text and Data Mining valid from 2024-03-11
Version of Record valid from 2024-03-11
Article History
Received: 21 June 2023
Revised: 10 August 2023
Accepted: 21 August 2023
First Online: 11 March 2024
CONFLICT OF INTEREST
: The authors declare that they have no conflicts of interest.