Molecular Layer Deposition and Pyrolysis of Polyamide Films on Si(111) with Formation of β-SiC
Crossref DOI link: https://doi.org/10.1134/S0036024421070049
Published Online: 2021-07-15
Published Print: 2021-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Amashaev, R. R.
Abdulagatov, I. M.
Rabadanov, M. Kh.
Abdulagatov, A. I.
Text and Data Mining valid from 2021-07-01
Version of Record valid from 2021-07-01
Article History
Received: 1 September 2020
Revised: 20 October 2020
Accepted: 21 October 2020
First Online: 15 July 2021