Deposition of oxide nanostructures by nanosecond laser ablation of silicon in an oxygen-containing background gas
Crossref DOI link: https://doi.org/10.1134/S0869864321040089
Published Online: 2021-12-13
Published Print: 2021-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Rodionov, A. A.
Starinskiy, S. V.
Shukhov, Yu. G.
Bulgakov, A. V.
Text and Data Mining valid from 2021-07-01
Version of Record valid from 2021-07-01
Article History
Received: 17 October 2020
Revised: 15 March 2021
Accepted: 18 May 2021
First Online: 13 December 2021