Computer simulation of the two-stage ion polishing of a silicon surface
Crossref DOI link: https://doi.org/10.1134/S1027451014030252
Published Online: 2014-06-06
Published Print: 2014-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Birkgan, S. E.
Bachurin, V. I.
Text and Data Mining valid from 2014-05-01