Measurement of the SEM-beam diameter using a relief structure: Influence of contamination
Crossref DOI link: https://doi.org/10.1134/S1027451014050127
Published Online: 2014-12-05
Published Print: 2014-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Larionov, Yu. V.
Text and Data Mining valid from 2014-11-01