Investigation of the structure, elemental and phase composition of coatings on the basis of oxynitride titanium deposited by reactive magnetron sputtering
Crossref DOI link: https://doi.org/10.1134/S1027451014060391
Published Online: 2014-12-05
Published Print: 2014-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Nikitenkov, N. N.
Kiselyova, E. S.
Konischev, M. E.
Sypchenko, V. S.
Nikitenkov, A. N.
Pichugin, V. F.
Shylepov, I. A.
Epple, M.
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