Features of the growth of amorphous silicon thin films synthesized by magnetron sputtering
Crossref DOI link: https://doi.org/10.1134/S1027451015030313
Published Online: 2015-06-07
Published Print: 2015-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Mitin, D. M.
Aleksandrov, V. A.
Skaptsov, A. A.
Venig, S. B.
Serdobintsev, A. A.
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