Backscattered electron imaging of microand nanostructures: 4. Structures with a trapezoidal profile and large side-wall inclination angles
Crossref DOI link: https://doi.org/10.1134/S1027451016010286
Published Online: 2016-02-19
Published Print: 2016-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Novikov, Yu. A.
Text and Data Mining valid from 2016-01-01