Investigation of the interface of insulated silicon tensoresistive Frame-on-Silicon heterostructure for MEMS pressure transducers
Crossref DOI link: https://doi.org/10.1134/S1027451016010341
Published Online: 2016-02-19
Published Print: 2016-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Sokolov, L. V.
Text and Data Mining valid from 2016-01-01