Investigation of the technological features of anisotropic chemical etching upon the production of sensors of physical quantities
Crossref DOI link: https://doi.org/10.1134/S1027451017010177
Published Online: 2017-03-16
Published Print: 2017-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Parfenov, N. M.
Timoshenkov, S. P.
Timoshenkov, A. S.
License valid from 2017-01-01