Surface Morphology of NiSi2/Si Films Obtained by the Method of Solid-Phase Deposition
Crossref DOI link: https://doi.org/10.1134/S1027451020010188
Published Online: 2020-03-23
Published Print: 2020-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Tashatov, A. K.
Mustafoyeva, N. M.
Text and Data Mining valid from 2020-01-01
Version of Record valid from 2020-01-01
Article History
Received: 4 February 2019
Revised: 25 April 2019
Accepted: 27 May 2019
First Online: 23 March 2020